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Research program based on Planetary Reactor AIX G5WW starts end of 2014
September 11, 2014
By: DAVID SAVASTANO
Editor, Ink World Magazine
AIXTRON has teamed up with research institution Fraunhofer IISB (Institute for Integrated Systems and Device Technology) in Erlangen, Germany, to develop 150 mm Silicon Carbide (SiC) epitaxy processes using the new AIXTRON 8×150 mm G5WW Vapor Phase Epitaxy (VPE) system. AIXTRON’s Planetary Reactor tool will be installed at the IISB cleanroom laboratory in the fourth quarter of 2014. “Through this partnership we expect to further accelerate the implementation of 150 mm SiC technology in t...
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